Objective To optimize the treatment parameters for eliminating Aspergillus flavus on peanut surface through high voltage electric field cold plasma (HVCP) and analyze the effects on peanut quality.Methods With sterilization rate as the indicator, the HVCP sterilization process parameters for eliminating Aspergillus flavus on peanut surface are optimized through a response surface test. The morphological changes of Aspergillus flavus spores before and after HVCP treatment are observed and compared, and the effects of HVCP treatment on the crude fat content, crude fatty acid value, crude protein content, and color of peanuts are analyzed.Results The optimized HVCP sterilization process parameters are as follows: treatment voltage of 122 kV, treatment time of 13.5 min, and treatment frequency of 56 Hz. Under these conditions, the sterilization rate reaches 99.56%. The morphology of Aspergillus flavus spores change significantly compared with the untreated group. Furthermore, the treatment method does not significantly change the crude fat and crude protein content of peanuts, but it significantly reduces the fatty acid value and improves the color brightness of the peanuts.Conclusion HVCP can effectively eliminate Aspergillus flavus on the surface of peanuts, and it can also improve the color brightness and reduce the fatty acid value of peanuts, without any influence on the quality and safety.