As an important part of the high-voltage pulsed electric field (Pulsed Electric Field, PEF) processing system, in order to develop a processing chamber unit suitable for use in combination with multiple processing chambers, we modeled the elliptical embedded type field sterilization processing chamber, and the electric field distribution and hydrodynamic characteristics of the chamber were obtained by ANSYS software. Furthermore, based on the simulation analysis, the structure of the processing chamber was optimized, and a new type of total field sterilization treatment chamber based on the optimization of fluid properties was proposed. It was proved that the performance of the processing chamber could meet the requirements of multi-processing chamber unit series combination, and this could provide some ideas for further optimizing the high-voltage PEF sterilization processing chamber.