In order to obtain the optimum process of thermosonication treatment（TST）sterilization of dried bean curd（DBC）, on the basis of single factor, the ultrasonic power, ultrasonic time and temperature were selected as the factors, and the decreased logarithm value of bacteria, color difference ΔE^*, L^*, a^*, b^*, hardness, chewiness, resilience, springiness, cohesiveness, protein content were used as indicators, the three-factor box Benhnken test was designed and the characteristic index for evaluating the quality of the DBC was screened out by factor analysis, the model was established and the best parameters were optimized. Results: the characteristic index for evaluating the quality of DBC were chewiness, color difference and resilience, The model of the decreased logarithm value of bacteria and the characteristic index for evaluating the quality of the DBC could be used to analyze and predict the effects of the TST parameters on the sterilization of the DBC and its effect on quality. The optimal process parameters for sterilization of DBC by the TST were: ultrasonic treating time 90 min, ultrasonic power 876 W, and temperature at 78 ℃. TST has the advantages of low temperature, high bactericidal efficiency and good preservation of texture and color of DBC. TST can be used for the DBC sterilization.