As a kind of high-efficiency quality-preserving extraction technology, the subcritical fluid extraction equipment is getting more and more attention in its industrial application. The review summarized the basic concepts, types and development of subcritical fluid extraction technology and equipment. Moreover, the development of subcritical fluid extraction equipment was reviewed from the aspects of laboratorial equipment and industrial equipment. The unique advantages and problems of subcritical fluid extraction technology in the processing of agricultural products were briefly described, and the development trend of subcritical fluid extraction equipment was also forecasted.