A new type of microwave and vacuum drying device combining waveguide and wave source cooling device was designed. This improvement helped to solve two big problems effectively, uneven distribution of microwave and wave source easily broken on heat. Because the material chamber is the intersection of microwave and vacuum chambers, material could be in microwave radiation as well as in vacuum environment. Thus, the material plates were hierarchical designed. On the one hand, they were easily tear down, on the other hand, material room space could be made full use. Moreover, the cold traps designed by modular to make it easily loaded and unloaded according to the requirements of drying, and this could effectively improve the utilization efficiency of the themselves. The microwave vacuum drying equipment design was clever, safe and reliable, and could satisfy the drying processing of high quality material.