In order to realize the real-time supervising of filter supply procedure, a filter error prevention system was development, based on WINCC, which integrated the technology of PLC, RFID and OPC. This system could show and supervise the whole procedure by data collection and analysis, realize the comparison of the status between the filter exchange center and the filter in use and transfer the monitoring pages to all terminal distributed nodes. The result showed that this system had realized error prevention of the whole filter applying procedure, and enhanced the level of lean management.