PEF sterilization technology is a popular sterilization technique, but the issue of cost for sterilization affects its industrialization process. The PEF sterilization equipment was studied from the perspective of the waveform energy efficiency and the energy efficiency of the chamber. The results showed that the closer the waveform was to a square wave waveform, the higher energy efficiency was, and the energy efficiency of food with higher conductivity is significantly higher than that of food with low conductivity. The energy efficiency can be improved by increasing the power of the chamber.